JPS63177030U - - Google Patents
Info
- Publication number
- JPS63177030U JPS63177030U JP6836487U JP6836487U JPS63177030U JP S63177030 U JPS63177030 U JP S63177030U JP 6836487 U JP6836487 U JP 6836487U JP 6836487 U JP6836487 U JP 6836487U JP S63177030 U JPS63177030 U JP S63177030U
- Authority
- JP
- Japan
- Prior art keywords
- lower electrode
- substrate
- support
- flat
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6836487U JPS63177030U (en]) | 1987-05-07 | 1987-05-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6836487U JPS63177030U (en]) | 1987-05-07 | 1987-05-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63177030U true JPS63177030U (en]) | 1988-11-16 |
Family
ID=30908111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6836487U Pending JPS63177030U (en]) | 1987-05-07 | 1987-05-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63177030U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01212435A (ja) * | 1988-02-20 | 1989-08-25 | Sanyo Electric Co Ltd | 薄膜形成方法 |
-
1987
- 1987-05-07 JP JP6836487U patent/JPS63177030U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01212435A (ja) * | 1988-02-20 | 1989-08-25 | Sanyo Electric Co Ltd | 薄膜形成方法 |